Selective laser etching (SLE) technology permits the microfabrication of complex-shaped microfluidic channels out of fused silica glass. The process consists of two technological steps. First, the desired part of the CAD design is directly written into the volume of the glass, which is subsequently etched away in the second processing step. The SLE technique makes it possible to produce taper-free micron precision channels with a low surface roughness of ~200 nm RMS. Because fused silica glass is transparent in the visible range, biocompatible and inert to most chemicals, SLE‑made microfluidics perfectly suit many science applications such as biochemical research.
Femtosecond microfabrication technology is applied in microfluidics through 3D laser lithography and selective laser etching (SLE). 3D laser lithography is used to produce micro filters and sensors, while SLE enables the production of complex-shaped microfluidic channels out of fused silica glass with low surface roughness and high precision.
A feasibility study is composed of several steps, including researching methods for fabricating micro-structures, fabricating a micro-structure prototype, measuring and aligning the prototype with technical requirements, and finally preparing a study report.