Ceramic Structures

The multiphoton polymerization technique with hybrid polymers in combination with pyrolysis enables the removal of the organic part of the polymer and produces ceramic structures. Structure shrinkage during pyrolysis is homogeneous and is approximately 25%. This property gives precise control of the structure geometry and obtains even higher resolution than the resolution in the polymeric parts which could be up to 100 nm. In contrast with polymers, ceramic structures show high mechanical rigidity, 1000 times more rigid than polymeric material. Ceramic structures are suitable for the fabrication of micromechanical parts.

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