Laser Nanofactory Selective Laser Etching
- Subtractive manufacturing technique
- Arbitrary-shaped 3D structures from glass µm to cm scale
- Various glasses applicable
- Self-alignment system for automatic laser beam alignment
- Micrometer feature resolution
Selective laser etching (SLE) is a subtractive laser technology allowing fabrication of complex-shape 3D glass parts with micrometer precision. This technology consists of two fabrications steps: femtosecond laser irradiation and subsequent chemical etching. Tightly focused femtosecond laser beam induces modifications of transparent material within the focal point of laser beam. By spatially moving the laser focus well-defined structure is written in point-by-point fashion up to substrate surface. Afterward, the sample is immersed in etchant solution, which etches out laser modified areas.
SLE is often used in the manufacturing of electronic devices and other precision components, as it allows for high levels of accuracy and detail in the etched patterns. Additionally, because the laser beam is highly focused, it can be used to etch very small and intricate designs.
|Materials||Fused silica, Borofloat 33|
|Smallest feature size||> 1 μm|
|Minimum surface roughness||< 200 nm|
|Maximum object height||1 cm|
|Aspect ratio||> 1 : 200|
|Minimum micro hole diameter||5 µm|
|Writing speed||50 mm/s|
|Wavelength||1030 ± 10 nm|
|Repetition rate||Single-shot – 1 MHz|
|Pulse duration||290 fs – 20 ps (tunable)|
|Max. average power||10 W|
|Long-term power stability||< 0.5% RMS over 100 h|
|XYZ positioning stages mounted on granite base with bridge||Travel (XYZ) 1)||160 mm × 160 mm × 60 mm|
|Accuracy (XYZ)||± 300 nm|
|Resolution (XYZ)||1 nm|
|Maximum speed (XY)||200 mm/s|
|Galvano scanners||Accuracy||50 μrad|
|Repeatability||0.4 µrad RMS|
|Monitoring on time||The fabrication process is monitored by an integrated machine vision system|
|Stitching||Stitchless fabrication using Infinite Field of View (IFoV)|
|Focusing optics||Objectives – from 0.25 to 0.45 NA 1)|
|Autofocus system||Automatic glass/polymer or glass/air interface optical detection|
|Self-Align-System (SAS)||Automatic laser beam path alignment system|
|Substrate||Universal vacuum sample holder with computer-controlled, position synchronized illumination for transparent samples|
|Beam delivery & control||Motorized attenuator, polarization rotator, beam expander. Integrated power meter enables real-time power monitoring|
|Software||Convenient control of all necessary process parameters and machine settings. The software handles standard formats of 3D designs created by popular CAD programs, like STL|
|Laser safety||Ergonomic housing to ensure laser safety class 1 and environment stability conditions for laser microfabrication process|
|Dimensions when all doors are closed (W × L × H)||1790 mm × 920 mm × 2270 mm|
|Dimensions when doors are opened (W × L × H)||2680 mm × 1900 mm × 2300 mm|
|Weight||~ 700 kg|
|Operating temperature 1)||20 ± 2 °C|
|Relative humidity 1)||≤ 60%|
|Electrical requirements||110 V AC, 20 A – 230 V AC , 10 A|
|AC power (normal operation)||typical 2 kW|
- The conditions of the environment are preferred to be as stable as possible.
The nozzle size can reach a few centimeters while the smallest channel may have a diameter of only a few micrometers. The nozzle could be used to deliver high-pressure gases and liquids to variable diameter outputs.
The Geneva gear is an arbitrary-shaped micromechanical component and is one of the most used devices for producing intermittent rotary motion.
Threads for Screw
The SLE technology permits straightforward conversion of the desired CAD design to a 3D micropart. Even mm-size structures with a few micrometers of precision can be printed in this way.
Tesla valve microfluidic channels can be fabricated inside the volume of glass. This microchannel design allows the liquid to flow in only one direction.
3D Glass Structures
Selective laser etching (SLE) technology enables the fabrication of true 3D glass structures with complex architecture, for instance, fullerene molecule‑like structures.