Femtosecond microfabrication technology is used in microfluidic applications, including 3D laser lithography and selective laser etching (SLE). 3D laser lithography is used to fabricate functional elements such as flow filters and sensors, with a total size of 200 µm and thickness of 5 µm. SLE allows the microfabrication of complex-shaped microfluidic channels out of fused silica glass, providing low surface roughness and enabling the production of 3D free-form structures with micron precision. SLE-made microfluidics are transparent, biocompatible, and inert, making them suitable for many scientific applications, such as biochemical research.
Tesla valve microfluidic channels can be fabricated inside the volume of glass. This microchannel design allows the liquid to flow in only one direction.
The nozzle size can reach a few centimeters while the smallest channel may have a diameter of only a few micrometers. The nozzle could be used to deliver high-pressure gases and liquids to variable diameter outputs.
Microfabrication by multi-photon polymerization is a direct laser-write technique which allows 3D structuring of photopolymers at the micro- and nano-scale.
A feasibility study is composed of several steps, including researching methods for fabricating micro-structures, fabricating a micro-structure prototype, measuring and aligning the prototype with technical requirements, and finally preparing a study report.