Laser Nanofactory Hybrid Fabrication


  • Additive and subtractive techniques combined in one Laser Nanofactory system
  • Arbitrary-shaped 3D structures from micrometers to centimeters scale
  • Fast switch from additive to subtractive microfabrication
  • Customizable configuration – integrate additional devices

Femtosecond lasers are extremely versatile tools allowing a great variety of different microfabrication processes. Each process has its own requirements for laser, beam delivery or material parameters. Our Laser Nanofactory workstation allows hybrid fabrication, meaning that various processes are supported by the same equipment. The two of our most frequently used processes are multiphoton polymerization and selective glass etching, however that is far from all! By precisely tuning its parameters the same machine is capable to perform more processes including:

  • Refractive index modification of transparent materials
  • Micro-ablation
  • Surface structuring
  • Micro-welding

In addition, Laser Nanofactory is a modular system, allowing further adaptation to your application. It supports various sample holders (e.g. for microscope slides, wafers, fibers) and different fabrication heads, optimized for your desired laser applications.

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Technology Additive manufacturing: Multiphoton Polymerization
Materials SZ2080, SU-8, Ormocers, Glassomer, hybrid organic-inorganic photopolymers, elastomers, proteins
Minimum XY feature size 150 nm
Minimum surface roughness Ra ≤ 20 nm
Maximum fabrication speed 30 mm/s


Technology Substractive manufacturing: Selective Laser Etching
Materials Fused silica, Borosilicate glass
Smallest feature size > 1 μm
Minimum surface roughness < 200 nm
Maximum object height 1 cm
Aspect ratio > 1 : 200
Minimum micro hole diameter 5 µm
Writing speed 50 mm/s
Femtosecond Laser Source
Wavelength 1030 ± 10 nm and 515 ± 10 nm
Repetition rate Single-shot – 1 MHz
Pulse duration 190 fs – 10 ps (tunable)
Max. average power from 5 W to 20 W 1)
Long-term power stability < 0.5% RMS over 100 h
  1. Customizable.
Linear stages with synchronized Galvano scanners
XYZ positioning stages mounted on granite base with bridge Travel (XYZ) 1) 160 mm × 160 mm × 60 mm
Accuracy (XYZ) ± 300 nm
Resolution (XYZ) 1 nm
Maximum speed (XY) 200 mm/s
Galvano scanners Accuracy 50 μrad
Repeatability 0.4 µrad RMS
  1. Customizable.
Other parameters
Monitoring on time The fabrication process is monitored by an integrated machine vision system
Stitching Stitchless fabrication using Infinite Field of View (IFoV)
Focusing optics Objectives – from 0.25 to 1.4 NA 1)
Autofocus system Automatic glass/polymer or glass/air interface optical detection
Self-Align-System (SAS) Automatic laser beam path alignment system
Substrate Universal vacuum sample holder with computer-controlled, position synchronized illumination for transparent samples
Beam delivery & control Motorized attenuator, polarization rotator, beam expander. Integrated power meter enables real-time power monitoring
Software Convenient control of all necessary process parameters and machine settings. The software handles standard formats of 3D designs created by popular CAD programs, like STL
Laser safety Ergonomic housing to ensure laser safety class 1 and environment stability conditions for laser microfabrication process
  1. Customizable.
Physical Dimensions
Dimensions when all doors are closed (W × L × H) 1790 mm × 920 mm × 2270 mm
Dimensions when doors are opened (W × L × H) 2680 mm × 1900 mm × 2300 mm
Weight ~ 700 kg
Environmental & Utility Requirements
Operating temperature 1) 20 ± 2 °C
Relative humidity 1) ≤ 60%
Electrical requirements 110 V AC, 20 A – 230 V AC , 10 A
AC power (normal operation) typical 2 kW
  1. The conditions of the environment are preferred to be as stable as possible.

Drawings & Images