Selective Laser Etching

Selective laser etching (SLE) is a subtractive laser technology allowing fabrication of complex-shape 3D glass parts with micrometer precision. This technology consists of two fabrications steps: femtosecond laser irradiation and subsequent chemical etching. Tightly focused femtosecond laser beam induces modifications of transparent material within the focal point of laser beam. By spatially moving the laser focus well-defined structure is written in point-by-point fashion up to substrate surface. Afterward, the sample is immersed in etchant solution, which etches out laser modified areas.

SLE is often used in the manufacturing of electronic devices and other precision components, as it allows for high levels of accuracy and detail in the etched patterns. Additionally, because the laser beam is highly focused, it can be used to etch very small and intricate designs.

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Selective Laser Etching
Examples Applications Industries Products Publications

Manufacturing examples

3D Nozzle

The nozzle size can reach a few centimeters while the smallest channel may have a diameter of only a few micrometers. The nozzle could be used to deliver high-pressure gases and liquids to variable diameter outputs.

Geneva Gear

The Geneva gear is an arbitrary-shaped micromechanical component and is one of the most used devices for producing intermittent rotary motion.

Threads for Screws

The SLE technology permits straightforward conversion of the desired CAD design to a 3D micropart. Even mm-size structures with a few micrometers of precision can be printed in this way.

Tesla Valve

Tesla valve microfluidic channels can be fabricated inside the volume of glass. This microchannel design allows the liquid to flow in only one direction.

3D Glass Structures

Selective laser etching (SLE) technology enables the fabrication of true 3D glass structures with complex architecture, for instance, fullerene molecule‑like structures.

Micro Channels Formation

The SLE technique makes it possible to produce taper-free micron precision channels with a low surface roughness of ~200 nm RMS.

Bistable Switch

Bistable switches are a versatile and reliable type of switch that can be used in a wide variety of applications. They are an essential component in many modern electronic systems.

 

Application fields

Micro-fluidics

Femtosecond microfabrication technology is applied in microfluidics through 3D laser lithography and selective laser etching (SLE). 3D laser lithography is used to produce micro filters and sensors, while SLE enables the production of complex-shaped microfluidic channels out of fused silica glass with low surface roughness and high precision.

Micro-mechanics

Femtosecond microfabrication in micromechanics applications uses techniques like multiphoton polymerization and selective laser etching to produce flexible and high-precision 3D structures. These structures, made of materials like polymers and ceramics, can be used in various fields like micromechanics and microrobotics and are ideal for applications that require movable assembly-free components.

Applying for Industries

Medical

Bioscience

Semicon

Industrial R&D

Micro-robotics

Laser Nanofactory

Selective Laser Etching

Selective laser etching (SLE) is a subtractive laser technology allowing fabrication of complex-shape 3D glass parts with micrometer precision.

Contract Manufacturing

Feasibility Studies

A feasibility study is composed of several steps, including researching methods for fabricating micro-structures, fabricating a micro-structure prototype, measuring and aligning the prototype with technical requirements, and finally preparing a study report.

Small Scale Production

Small-scale production is an essential step in the overall process of micro-structure fabrication, helping to ensure that the developed process is effective, efficient, and capable of producing high-quality micro-structures at scale.

Related Publications

Single-chip based contactless conductivity detection system for multi-channel separations

A. Maruška, T. Drevinskas, M. Stankevičius, K. Bimbiraitė-Survilienė, V. Kaškonienė, L. Jonušauskas, R. Gadonas, S. Nilsson, and O. Kornyšova. Anal. Methods, 2021, 13, 141–146, (2021). DOI: 10.1039/D0AY01882A.