Micro Channels Formation
Selective laser etching (SLE) technology permits the microfabrication of complex-shaped microfluidic channels out of fused silica glass. The process consists of two technological steps. First, the desired part of the CAD design is directly written into the volume of the glass, which is subsequently etched away in the second processing step. The SLE technique makes it possible to produce taper-free micron precision channels with a low surface roughness of ~200 nm RMS. Because fused silica glass is transparent in the visible range, biocompatible and inert to most chemicals, SLE‑made microfluidics perfectly suit many science applications such as biochemical research.