Semicon

The use of 3D femtosecond laser printing in the semiconductor industry is a relatively new and emerging field that involves the use of 3D printing technology to create highly detailed and complex microscale structures using femtosecond lasers. This technology is being used to create a wide range of microscale components and structures, such as sensors, actuators, and microelectromechanical systems (MEMS), for use in a variety of applications, including manufacturing, healthcare, and aerospace. The use of femtosecond lasers allows for the creation of highly precise and intricate structures, which can improve the performance of microscale components and systems. Additionally, 3D femtosecond laser printing can be used to produce large quantities of microscale components and structures quickly and efficiently, making it a valuable tool for semiconductor researchers and developers.

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Applications Processes Products Publications Related Examples

Manufacturing examples

3D Nozzle

The nozzle size can reach a few centimeters while the smallest channel may have a diameter of only a few micrometers. The nozzle could be used to deliver high-pressure gases and liquids to variable diameter outputs.

Holes in Hard Metal

Femtosecond laser micro-drilling stands out by its accuracy and minimum heat affected zone. The process is applicable to a wide variety of materials, including different metals, ceramics, polymers, and glass.

Application fields

Micro-fluidics

Femtosecond microfabrication technology is applied in microfluidics through 3D laser lithography and selective laser etching (SLE). 3D laser lithography is used to produce micro filters and sensors, while SLE enables the production of complex-shaped microfluidic channels out of fused silica glass with low surface roughness and high precision.

Filters, Flow Moulders

Femtosecond laser micro-drilling is precise and produces minimal heat, making it useful for drilling filters, nozzles, and tools in materials such as metals, ceramics, polymers, and glass. It’s also useful for making cuts in materials without leaving debris.

Employed Processes

Selective Laser Etching

Selective laser etching (SLE) is a subtractive laser technology allowing fabrication of complex-shape 3D glass parts with micrometer precision.

Other Microfabrications

Femtosecond lasers are extremely versatile tools allowing a great variety of different microfabrication processes, like micro-ablation, surface structuring, micro-welding, laser marking, micro-cutting and more.

Laser Nanofactory

Hybrid Fabrication

Laser Nanofactory workstation allows hybrid fabrication, meaning that various processes are supported by the same equipment. The two of our most frequently used processes are multiphoton polymerization and selective glass etching, however that is far from all!

Selective Laser Etching

Selective laser etching (SLE) is a subtractive laser technology allowing fabrication of complex-shape 3D glass parts with micrometer precision.

Contract Manufacturing

Feasibility Studies

A feasibility study is composed of several steps, including researching methods for fabricating micro-structures, fabricating a micro-structure prototype, measuring and aligning the prototype with technical requirements, and finally preparing a study report.

Small Scale Production

Small-scale production is an essential step in the overall process of micro-structure fabrication, helping to ensure that the developed process is effective, efficient, and capable of producing high-quality micro-structures at scale.

Related Publications

Single-chip based contactless conductivity detection system for multi-channel separations

A. Maruška, T. Drevinskas, M. Stankevičius, K. Bimbiraitė-Survilienė, V. Kaškonienė, L. Jonušauskas, R. Gadonas, S. Nilsson, and O. Kornyšova. Anal. Methods, 2021, 13, 141–146, (2021). DOI: 10.1039/D0AY01882A.