Laser Nanofactory Multi-Photon Polimerization


  • Nanometer resolution additive manufacturing technique
  • True 3D structures in micrometer scale
  • Various polymers available
  • Stitching error-free manufacturing

Multiphoton-polymerization (MPP) is a technology that enables the production of arbitrary shape polymeric structures within submicrometric resolution. First, a photoresist sample is prepared by drop-casting polymer material mixed with a photoinitiator on the glass slide and then pre-baking. Afterward, the 3D microstructure is fabricated using a direct laser writing technique. Consequently, the polymer hardens in places of drop where it is affected by laser radiation due to a process called photopolymerization. Finally, the microstructure is immersed in an organic solvent to develop an unpolymerized photoresist.

MPP has become a popular choice in the manufacturing of microelectronic devices due to its exceptional ability to produce intricate and precise structures. Its highly focused light source also enables the creation of complex 3D shapes with ease.


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Technology Additive manufacturing
Materials SZ2080, SU-8, Ormocers, Glassomer, hybrid organic-inorganic photopolymers, elastomers, proteins
Minimum XY feature size 150 nm
Minimum surface roughness Ra ≤ 20 nm
Maximum fabrication speed 30 mm/s
Femtosecond Laser Source
Wavelength 780 nm 1030 ± 10 nm
515 ± 10 nm
Repetition rate 100 MHz 11 MHz … 76 MHz Single-shot – 1 MHz
Pulse duration < 100 fs 50 fs
120 fs
170 fs
290 fs – 20 ps (tunable)
Max. average power 250 mW 2 W 5 W
Long-term power stability < 0.5% RMS over 24 h < 0.5% RMS over 100 h
Linear stages with synchronized Galvano scanners
XYZ positioning stages mounted on granite base with bridge Travel (XYZ) 1) 160 mm × 160 mm × 60 mm
Accuracy (XYZ) ± 300 nm
Resolution (XYZ) 1 nm
Maximum speed (XY) 200 mm/s
Galvano scanners Accuracy 50 μrad
Repeatability 0.4 µrad RMS
  1. Customizable.
Other parameters
Monitoring on time The fabrication process is monitored by an integrated machine vision system
Stitching Stitchless fabrication using Infinite Field of View (IFoV)
Focusing optics Objectives – from 0.4 to 1.4 NA 1)
Autofocus system Automatic glass/polymer or glass/air interface optical detection
Self-Align-System (SAS) Automatic laser beam path alignment system
Substrate Universal vacuum sample holder with computer-controlled, position synchronized illumination for transparent samples
Beam delivery & control Motorized attenuator, polarization rotator, beam expander. Integrated power meter enables real-time power monitoring
Software Convenient control of all necessary process parameters and machine settings. The software handles standard formats of 3D designs created by popular CAD programs, like STL
Laser safety Ergonomic housing to ensure laser safety class 1 and environment stability conditions for laser microfabrication process
  1. Customizable.
Physical Dimensions
Dimensions when all doors are closed (W × L × H) 1790 mm × 920 mm × 2270 mm
Dimensions when doors are opened (W × L × H) 2680 mm × 1900 mm × 2300 mm
Weight ~ 700 kg
Environmental & Utility Requirements
Operating temperature 1) 20 ± 2 °C
Relative humidity 1) ≤ 60%
Electrical requirements 110 V AC, 20 A – 230 V AC , 10 A
AC power (normal operation) typical 2 kW
  1. The conditions of the environment are preferred to be as stable as possible.

Drawings & Images

Manufacturing examples