Micromechanical Sensor

Femtosecond direct laser writing processes enable hybrid microfabrication of additive and subtractive technologies to create integrated systems. By selective laser etching (SLE), glass microstructures can be made and polymeric structures can be integrated into the glass microstructures using multiphoton polymerization (MPP).

This incorporation of techniques demonstrates the capability of combining mechanical deformable devices made of silica with an integrated polymer structure for passive chemical sensing application. As glass is an amorphous material, its material properties are identical in all directions. Also, thin glass structures are flexible, and the deformations are elastic. These glass properties can be applied for investigating the mechanical properties of polymeric structures through a coupled microchemical sensor system.

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