Femtosecond direct laser writing processes enable hybrid microfabrication of additive and subtractive technologies to create integrated systems. By selective laser etching (SLE), glass microstructures can be made and polymeric structures can be integrated into the glass microstructures using multiphoton polymerization (MPP).
This incorporation of techniques demonstrates the capability of combining mechanical deformable devices made of silica with an integrated polymer structure for passive chemical sensing application. As glass is an amorphous material, its material properties are identical in all directions. Also, thin glass structures are flexible, and the deformations are elastic. These glass properties can be applied for investigating the mechanical properties of polymeric structures through a coupled microchemical sensor system.
Multi-photon polymerization (MPP) enables the production of precise and strong microlenses and microneedles for visualization, filtering, and drug delivery. MPP can also be combined with other fabrication techniques such as selective laser etching to create hybrid microfabricated systems, like glass and polymer structures.
A feasibility study is composed of several steps, including researching methods for fabricating micro-structures, fabricating a micro-structure prototype, measuring and aligning the prototype with technical requirements, and finally preparing a study report.