The use of 3D femtosecond laser printing in the semiconductor industry is a relatively new and emerging field that involves the use of 3D printing technology to create highly detailed and complex microscale structures using femtosecond lasers. This technology is being used to create a wide range of microscale components and structures, such as sensors, actuators, and microelectromechanical systems (MEMS), for use in a variety of applications, including manufacturing, healthcare, and aerospace. The use of femtosecond lasers allows for the creation of highly precise and intricate structures, which can improve the performance of microscale components and systems. Additionally, 3D femtosecond laser printing can be used to produce large quantities of microscale components and structures quickly and efficiently, making it a valuable tool for semiconductor researchers and developers.
The nozzle size can reach a few centimeters while the smallest channel may have a diameter of only a few micrometers. The nozzle could be used to deliver high-pressure gases and liquids to variable diameter outputs.
Femtosecond microfabrication technology is applied in microfluidics through 3D laser lithography and selective laser etching (SLE). 3D laser lithography is used to produce micro filters and sensors, while SLE enables the production of complex-shaped microfluidic channels out of fused silica glass with low surface roughness and high precision.
Selective Laser Etching
Selective laser etching (SLE) is a subtractive laser technology allowing fabrication of complex-shape 3D glass parts with micrometer precision.
Laser Nanofactory workstation allows hybrid fabrication, meaning that various processes are supported by the same equipment. The two of our most frequently used processes are multiphoton polymerization and selective glass etching, however that is far from all!
A feasibility study is composed of several steps, including researching methods for fabricating micro-structures, fabricating a micro-structure prototype, measuring and aligning the prototype with technical requirements, and finally preparing a study report.