Femtosecond microfabrication is a new technology for the production of high-precision micromechanical components that can be used in fields such as micromechanics and microrobotics. One example is the use of multiphoton polymerization with hybrid polymers in combination with pyrolysis to create ceramic structures with high mechanical rigidity, which are suitable for the fabrication of micromechanical parts. Another example is selective laser etching (SLE) technology, which enables the fabrication of true 3D glass structures with complex architecture and low surface roughness. This technology can produce structures such as the Geneva gear or fullerene molecule-like structures with high selectivity and aspect ratio.

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