Femtosecond direct laser writing processes enable hybrid microfabrication of additive and subtractive technologies to create integrated systems. By selective laser etching (SLE), glass microstructures can be made and polymeric structures can be integrated into the glass microstructures using multiphoton polymerization (MPP).
The hybrid-fabrication approach enables rapid production of channels out of fused silica via laser ablation, while multiphoton polymerization is used to integrate fine-mesh 3D filters of arbitrary geometry inside the channel.
By using a hybrid microfabrication approach, complex lab-on-chip devices can be produced. The Channel system is made by using the Selective Laser Etching technique (SLE). Polymeric filters are integrated inside the prepared microfluidic system by using multi-photon polymerization (MPP).