Femtosecond microfabrication technology is used in microfluidic applications, including 3D laser lithography and selective laser etching (SLE). 3D laser lithography is used to fabricate functional elements such as flow filters and sensors, with a total size of 200 µm and thickness of 5 µm. SLE allows the microfabrication of complex-shaped microfluidic channels out of fused silica glass, providing low surface roughness and enabling the production of 3D free-form structures with micron precision. SLE-made microfluidics are transparent, biocompatible, and inert, making them suitable for many scientific applications, such as biochemical research.
